Application of Maximum Entropy Method to Semiconductor Engineering
نویسندگان
چکیده
منابع مشابه
Application of Maximum Entropy Method to Semiconductor Engineering
The maximum entropy method (MEM) is widely used in research fields such as linguistics, meteorology, physics, and chemistry. Recently, MEM application has become a subject of interest in the semiconductor engineering field, in which devices utilize very thin films composed of many materials. For thin film fabrication, it is essential to thoroughly understand atomic-scale structures, internal fi...
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ژورنال
عنوان ژورنال: Entropy
سال: 2013
ISSN: 1099-4300
DOI: 10.3390/e15051663